The development of clean rooms is closely related to modern industry and cutting-edge technology. Due to the environmental requirements of precision machinery industry (such as gyroscope, micro bearing processing) and semiconductor industry (such as large-scale integrated circuit production), the development of clean room technology has been promoted. According to statistics in China, the qualification rate of MOS circuit cores produced in the environment without the requirement of cleanliness level is only 10%~15%, and that of 64 memory is only 2%. At present, clean rooms are widely used in precision machinery, semiconductor, aerospace, atomic energy and other industries.

To reach the cleanliness level, the clean room must have comprehensive measures, including process layout, building plan, building structure, building decoration, personnel and material purification, air cleaning measures, maintenance management, etc. Among them, air cleaning measures are the fundamental guarantee for achieving the cleanliness level. As far as air cleaning is concerned, there are mainly the following specific measures:

(1) The air supply to the clean room must be air with high cleanliness. Therefore, high efficiency or sub high efficiency filter (when the cleanliness level is low) must be selected as the terminal filter to filter the air entering the clean room at the last level. In order to protect the terminal filter and extend its service life, the air must be filtered by the medium efficiency filter first.

(2) According to the grade of the clean room, the air distribution flow pattern of the clean room shall be reasonably selected, and the eddy current area shall be avoided in the working area; Try to make the clean air sent into the room directly reach the working area; The flow of airflow is conducive to the removal of particles in the clean room from the air return outlet.

(3) There is enough air volume to ensure the dust concentration of dilution air and stable airflow pattern.

(4) A certain positive pressure value shall be maintained between clean rooms of different grades, clean rooms and non clean rooms, or clean rooms and outdoors.

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